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Premium heat treatment tool for semiconductor industry application

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Credit: BTU International

BTU International, a wholly-owned subsidiary of Amtech Group, is a global supplier and technology leader of advanced thermal processing equipment in the electronics and semiconductor manufacturing market. BTU's high-performance reflow ovens are used in the production of SMT printed circuit board assemblies and in semiconductor packaging processes. For semiconductor packaging applications where warpage of very thin substrates is a concern BTU offers the Pyramax TrueFlat configuration.

The Pyramax TrueFlat operates without the use of a vacuum pump or specialty tooling and uses convection heat transfer for superior thermal uniformity. BTU's Pyramax TrueFlat is the market leader for the controlled reflow of very thin substrates with extensive install base throughout Taiwan and Asia.

BTU and its distributor welcome you at booth I2716 in SEMICON Taiwan 2021 International Semiconductor Show.

Pyramax is also offered in a vacuum reflow configuration, the Pyramax Vacuum, where the convection oven is configured with a vacuum chamber in the reflow zone. Vacuum reflow has been proven to be a reliable solution for virtually eliminating solder voids. Solder voids have been identified as a reliability issue for some critical applications.

For front-end semiconductor processing the BTU BDF 300 is the market leading solution for 300mm horizontal diffusion furnaces. The BDF is offered in 3 tube configuration and features full cassette to cassette automation and maximum process temperature of 1200 degrees C, making it the tool of choice for power semiconductor applications. The BDF, Bruce Diffusion Furnace, is also offered in 200mm and 150mm/100mm models, the BDF 200 and BDF 41 respectively.

BTU also specializes in precision controlled, high-temperature belt furnaces for a wide range of custom applications, such as brazing, direct bond copper (DBC), and sintering. These continuous furnaces are available with air atmospheres, inert atmospheres, reducing atmospheres and operate at temperatures up to 1180 degrees C. These controlled atmosphere furnaces excel in applications where precise control of temperature (-/-2 degrees across the belt width) is required.

BTU has operations in North Billerica, Massachusetts, and Shanghai, China, with direct sales and service in the U.S.A., Asia and Europe. In Taiwan BTU maintains direct sales, service and marketing offices. Information about BTU International is available at www.btu.com. BTU also operates fully functional process labs in the US and China.

To learn about Pyramax high-performance reflow oven, visit booth I2716 in SEMICON Taiwan 2021.

To learn about Pyramax high-performance reflow oven, visit booth I2716 in SEMICON Taiwan 2021.