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TSMC Fab 12 producing 0.13-micron, all-copper SRAM

Chiali Chen, Taipei; Juliet Tzou, DIGITIMES Asia Tuesday 23 October 2001 0

Following on from its success in adopting the 0.15-micron process in pilot production of SRAM in its 12-inch fab in August, Taiwan Semiconductor Manufacturing Company (TSMC) announced on October 22 that it made SRAM chips with 0.13-micron, all-copper...

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