PSC installs 12-inch back-end SACVD equipment

Hans Wu, Taipei; Jane Wang, DIGITIMES Asia Tuesday 26 March 2002 0

Powerchip Semiconductor Corporation (PSC) formally moved into the 12-inch wafer era on March 25 with its purchase of SACVD (sub-atmospheric pressure chemical vapor deposition) wafer production equipment from Applied Materials. Installation took place...

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