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The Da Vinci road – SEZ’s Da Vinci tool enables single-wafer wet processing

Chris Hall, DigiTimes.com, Taipei Wednesday 14 September 2005 0

At Semicon Taiwan 2005, the SEZ Group was showing its Da Vinci series of single-wafer wet processing systems, which target polymer removal for copper dual-damascene etch. The Da Vinci series is applicable to 90-nanometer process nodes and is now proven...

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