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Promos orders Genus StrataGem 300mm ALD process tools

Press release, Editor, DigiTimes.com, Taipei Wednesday 14 September 2005 0

ProMOS Technologies has placed a purchase order agreement for a production ALD system from Genus, a member of the Aixtron Group. The system will initially be used for the volume production of advanced memory devices using 90nm technology at the new...

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