Novellus confident about PECVD market

Claire Sung, Taipei; Esther Lam, DIGITIMES Asia Tuesday 3 April 2007 0

Having landed orders from the top-two foundries for its plasma enhanced chemical vapor deposition (PECVD) systems on 65nm wafer production, Novellus Systems is confident that its systems are capable of meeting requirements for 65nm following satisfactory...

The article requires paid subscription. Subscribe Now

Email address

Password

Save my User ID and Password

Save my User ID and Password

Some subscribers prefer to save their log-in information so they do not have to enter their User ID and Password each time they visit the site. To activate this function, check the 'Save my User ID and Password' box in the log-in section. This will save the password on the computer you're using to access the site.

Note: If you choose to use the log-out feature, you will lose your saved information. This means you will be required to log-in the next time you visit our site.

NEW individual users please REGISTER first.

Enterprise user first-time LOGIN.

I forgot my ID and/or password?

MEMBERSHIP BENEFITS