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ASML claims i-Line scanners achieve record 300mm productivity at Taiwan client

Press release, September 12; Rodney Chan, DIGITIMES Asia Thursday 13 September 2007 0

ASML Holding has announced that a Taiwanese customer using its Twinscan i-Line scanners has achieved an unprecedented level of 300mm productivity by processing 150 wafers per hour for 24 hours, reaching a record output of 3,596 wafers in a single day...

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