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High-NA EUV adoption hampered by cost, mass-production on track for 2026

Annie Huang, Taipei; Jingyue Hsiao, DIGITIMES Asia 0

Greet Storms, VP of Product Management for High NA EUV at ASML. Credit: DIGITIMES

Despite ASML being the sole provider of high-NA EUV systems, customer adoption is affected by the high price, as ASML aims to begin mass production of the system by 2026.

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