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Taiwan intros first public APT system to detect trace elements in advanced chips

Bryan Chuang, Hsinchu; Willis Ke, DIGITIMES Asia Friday 21 April 2023 0

Credit: DIGITIMES

The Taiwan Semiconductor Research Institute (TSRI), under the National Applied Research Laboratories (NARLabs), has recently purchased atom probe tomography (APT) equipment to support the detection of trace elements in semiconductor components by academic...

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