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The application of nanoimprint lithography (1): technology and challenges

Albert Lin, Special to DIGITIMES; Judy Lin, DIGITIMES Asia Tuesday 28 November 2023 0

Credit: DIGITIMES

Recently, the Japanese semiconductor equipment manufacturer Canon released the nanoimprint lithography (NIL) machine FPA-1200NZ2C, capable of achieving a 5-nanometer process node. Nanoimprint lithography is one of the methods in semiconductor manufacturing...

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