Taipei, Friday, May 22, 2015 21:17 (GMT+8)
mostly cloudy
Taipei
25°C
KLA-Tencor VisEdge CV300R-EP
Photo: Company [Sep 1, 2010]

KLA-Tencor has announced the latest addition to its VisEdge family of wafer edge inspection and metrology systems.

The VisEdge CV300R-EP introduces two edge-metrology capabilities designed to help fabs identify potentially yield-impacting irregularities in the shape of the wafer edge profile or in the edges of films deposited on the wafer.

"Monitoring film concentricity is critical because overlapping film edges may lead to film delamination, increased edge defectivity and eventual yield loss," said Remo Kirsch, manager of Contamination Free Manufacturing at Globalfoundries Fab1, located in Dresden, Germany. "KLA-Tencor's VisEdge tool has the unique ability to trace the position of the edge of the copper film through both the patterned and unpatterned areas near the wafer edge, allowing us to determine the concentricity of the copper film with respect to the center of the wafer. We have implemented a daily monitoring strategy using the VisEdge system to qualify process chambers for the copper interconnect layers."

Innodisk at Computex Taipei 2015
2015 China smartphone panel trend forecast
Analysis of China revised domestic semiconductor industry goals
  • Wireless broadband developments in Southeast Asia markets

    As of 2013, the 10 ASEAN nations had a total of over 700 million mobile subscriptions, with the CAGR from 2003-2013 reaching 24%. This Digitimes Research Special Report analyzes the various mobile broadband markets in ASEAN and looks at the respective trends in 4G LTE development for those markets.

  • 2015 global tablet demand forecast

    This Digitimes Research Special Report provides a 2015 forecast for the global tablet market and analyzes the strategies of key market players such as Google, Apple, Intel, and Microsoft.

  • 2015 China smartphone panel trend forecast

    This Digitimes Research Special Report analyzes the strategies of key China-based major panel makers BOE, Tianma and IVO for attacking the different market segments through technology and pricing, and their relationship to local vendors Huawei, Lenovo, ZTE, Xiaomi and Coolpad.