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KLA-Tencor shipping 450mm-capable tools

Jessie Shen, DIGITIMES, Taipei Thursday 12 July 2012 0

KLA-Tencor has announced the installation of its first process control systems capable of handling and inspecting 450mm wafers. Fully automated, the Surfscan SP3 450 meets the demanding defect and surface quality characterization requirements of the...

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