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KLA-Tencor intros new LED wafer inspection system

Press release; Jessie Shen, DIGITIMES Asia Wednesday 5 December 2012 0

KLA-Tencor has announced its next-generation LED patterned wafer inspection tool, the ICOS WI-2280. Designed specifically for defect inspection and 2D metrology for LED applications, the ICOS WI-2280 also provides enhanced inspection capabilities and...

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