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Cymer unveils new DUV immersion light source

Press release; Jessie Shen, DIGITIMES Asia Monday 1 December 2014 0

Cymer, an ASML company, has announced its new argon fluoride (ArF) immersion light source, the XLR 700ix. Built on the XLR platform, the 700ix provides improvements in bandwidth, wavelength and energy stability, enabling higher scanner throughput and...

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