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Taiwan DRAM makers see delays in immersion litho delivery

Josephine Lien, Taipei; Jessie Shen, DIGITIMES Asia Monday 25 January 2010 0

Growing delivery lead times for immersion scanner equipment is likely to interrupt Nanya Technology and Inotera Memories' planned technology transition to sub-50nm in 2010, according to industry sources. Rexchip Electronics, which expects to begin equipment...

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