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AMEC intros ICP etcher for advanced memory and logic IC designs

Jessie Shen, DIGITIMES, Taipei Wednesday 14 March 2018 0

At the ongoing SEMICON China, Advanced Micro-Fabrication Equipment (AMEC) has unveiled its Primo nanova system - the company's first inductively coupled plasma (ICP) etcher for high-volume front-end production of memory and logic ICs.

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