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TSMC now reportedly operates over half of global EUVs, weighs high-NA adoption

Amanda Liang; Willis Ke, DIGITIMES Asia 0

Credit: ASML

Each low-numerical aperture (NA) extreme ultraviolet (EUV) lithography system costs over US$100 million, making it one of the most expensive semiconductor manufacturing tools in history. This raises a key question: How many of these advanced EUV systems...

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