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Imec and Cadence complete tapeout of first 5nm test chip

Press release; Jessie Shen, DIGITIMES Asia Thursday 8 October 2015 0

Nano-electronics research center imec and Cadence Design Systems have announced that the companies completed the first tapeout of a 5nm test chip using extreme ultraviolet (EUV) as well as 193 immersion (193i) lithography.

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