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Samsung said to use high-end EUV pellicles to stabilize 3nm yield

Amy Fan, Taipei; Willis Ke, DIGITIMES Asia Wednesday 4 January 2023 0

Credit: AFP

Samsung Electronics reportedly will incorporate the latest EUV mask pellicles with a light transmittance rate of over 90% into its 3nm process for yield improvement, with the pellicles to be sourced from S&S Tech, according to a Korean news repor...

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