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Debunking China's first indigenous DUV lithography system

Amanda Liang, Taipei; Charlene Chen, DIGITIMES Asia Monday 16 September 2024 0

Credit: ASML

The recent unveiling of a new local deep ultraviolet (DUV) lithography machine model by China's Ministry of Industry and Information Technology (MIIT) has become a hot topic of discussion online in China. Amid circulating rumors that China has developed...

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