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SMIC struggling to obtain EUV litho equipment

Monica Chen, Hsinchu; Jessie Shen, DIGITIMES Asia Thursday 17 December 2020 0

China's SMIC is struggling to obtain crucial EUV lithography equipment for the development of its sub-7nm process technologies, and will be seeking a dialogue with ASML with the help of its newly-appointed vice chairman, according to industry observe...

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